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Focused ion beam milling of microchannels in lithium niobate

Focused ion beam milling of microchannels in lithium niobate Manoj Sridhar 1 a Devendra K Maurya 1 2 James R Friend 1 2 b and Leslie Y Yeo1 2 b 1Melbourne Centre for Nanofabrication Clayton VIC Australia 2Micro Nanophysics Research Laboratory Department of Mechanical and Aerospace Engineering Monash University Clayton VIC Australia

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Lithium niobate LiNbO3 is a crystalline material which is widely applied in surface acoustic wave MEMS and optical devices owing to its superior physical optical and electronic properties

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INVESTIGATION OF NANOSCALE ETCHING AND POLING OF LITHIUM NIOBATE by Stacie Elizabeth Smith A thesis submitted in partial fulfillment of the requirements for the degree of Master of Science in Electrical Engineering MONTANA STATE UNIVERSITY Bozeman Montana April 2014

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Lithium niobate material is widely used in MEMS application due to its piezoelectric properties This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design A high precision CNC machine was used to machine a sample of lithium niobate material at

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Nanostructuring lithium niobate substrates by The first method consists of direct FIB milling on LiNbO 3 and the second one is a combination of FIB

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Etching of Lithium Niobate From Ridge Waveguides to Photonic Crystal Structures H Hu R Ricken and W Sohler Angewandte Physik Universität Paderborn 33098 Paderborn Germany niobate substrates by focused ion beam milling Optical Materials Vol 27 pp 1421–1425 2005

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Diamond micro milling of lithium niobate for sensing

Abstract Lithium niobate LiNbO 3 is a crystalline material which is widely applied in surface acoustic wave microelectromechanical systems MEMS and optical devices owing to its superior physical optical and electronic properties Due to its low toughness and chemical inactivity LiNbO 3 is considered to be a hard to machine material and has been traditionally left as as an inert

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Lithium niobate ridge waveguides and modulators fabricated

Ridge waveguides are fabricated using submicron thin films of lithium niobate prepared by crystal ion slicing and wafer bonding smart guide The waveguides are made by physical etching the lithium niobate thin film using ion beam milling The waveguides are low loss An electro optic polarization modulator with VπL of 15Vcm at λ 1 55μm is demonstrated using the waveguides

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Nanostructuring lithium niobate substrates by focused ion

We report on two novel ways for patterning Lithium Niobate LN at submicronic scale by means of focused ion beam FIB bombardment The first method consists of direct FIB milling on LiNbO3 and the second one is a combination of FIB milling on a deposited metallic

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Focused ion beam milling of microchannels in lithium niobate

We present experimental and simulation results for focused ion beam FIB milling of microchannels in lithium niobate in this paper We investigate two different cuts of lithium niobate Y and Z cuts and observe that the experimental material removal rate in the FIB for both Y cut and Z cut samples was 0 3 m 3 nC roughly two times greater

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Abstract We report on two novel ways for patterning Lithium Niobate LN at submicronic scale by means of focused ion beam FIB bombardment The first method consists of direct FIB milling on LiNbO3 and the second one is a combination of FIB milling on a deposited metallic layer and subsequent RIE Reactive Ion Etching etching

Focused ion beam milling of microchannels in lithium niobate

Focused ion beam milling of microchannels in lithium niobate Manoj Sridhar Devendra K Maurya James R Friend and Leslie Y Yeo Citation Biomicrofluidics 6 012819 2012 doi 10 1063 1 3673260

Nanostructuring lithium niobate substrates by focused ion

Abstract We report on two novel ways for patterning lithium niobate LN at submicronic scale by means of focused ion beam FIB bombardment The first method consists of direct FIB milling on LiNbO 3 and the second one is a combination of FIB milling on a deposited metallic layer and subsequent RIE Reactive Ion Etching etching FIB images show in both cases homogeneous structures with well

Focused ion beam milling of microchannels in lithium niobate

FULL TEXT Abstract We present experimental and simulation results for focused ion beam FIB milling of microchannels in lithium niobate in this paper We

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Focused ion beam milling of microchannels in lithium niobate

Focused ion beam milling of microchannels in lithium niobate Manoj Sridhar Devendra K Maurya James R Friend and Leslie Y Yeo Focused ion beam milling of microchannels in lithium niobate Manoj Sridhar 1 a range of structures and show that FIB milling of nanochannels on lithium niobate

Diamond micro milling of lithium niobate for sensing

Diamond micro milling of lithium niobate for sensing applications Dehong Huo 1 Zi Jie Choong 1 Yilun Shi 1 John Hedley 1 and Yan Zhao 2 Sridhar M Maurya D K Friend J R and Yeo L Y 2012 Focused ion beam milling of microchannels in lithium niobate Biomicrofluidics 6

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Focused ion beam milling of microchannels in lithium niobate

PDF We present experimental and simulation results for focused ion beam FIB milling of microchannels in lithium niobate in this paper We investigate two different cuts of lithium niobate

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2 5 2 Focused Ion Beam Milling 40 2 6 Analysis and Feasibility 40 2 6 1 Etching 40 lithium niobate revealed after an HF etch 93 5 3 Four images showing lines and dots littered across the surface of the LN samples 94 5 4 Two images showing one box in the grid each box was expected to have only on poled spot

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Focused ion beam milling of microchannels in lithium niobate

Sridhar M Maurya DK Friend JR Yeo LY We present experimental and simulation results for focused ion beam FIB milling of microchannels in lithium niobate in this paper We investigate two different cuts of lithium niobate Y and Z cuts and observe that the experimental material removal rate

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